Ammonium Fluoride Semiconductor Grade (NH4F 40%)
CAS Number: 12125-01-8
Semiconductor grade ammonium fluoride (40% aqueous solution) is a key component in buffered oxide etch (BOE) formulations and silicon nitride etching chemistry. Its ultra-pure quality ensures minimal metallic contamination on wafer surfaces. It is also used as a pH buffer and fluoride source in various wet process baths.
Technical Specifications
| appearance | Colorless clear liquid |
| pH (25°C) | 6.5–7.5 |
| purity (%) | ≥40.0 (NH4F assay) |
| chloride (Cl-) | ≤0.5 ppm |
| metallic impurities | ≤1 ppb each (SEMI grade) |
Applications
- BOE buffered oxide etch formulation
- Silicon nitride selective etching
- pH adjustment in wet etch baths
- Fluoride source for surface passivation
- Photomask cleaning chemistry
Key Features
- Ultra-pure SEMI grade with sub-ppb metal impurity control
- Excellent buffering capacity for stable BOE bath maintenance
- Low particle count for defect-free wafer processing
- Supplied in high-purity HDPE containers to prevent ion leaching
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CAS Number
12125-01-8
Category
Semiconductor Etching ChemicalsAvailability
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