Acetone Semiconductor Grade (Photoresist Removal)
CAS Number: 67-64-1
Semiconductor grade acetone is an ultra-pure ketone solvent used for dissolving and removing photoresist, cleaning organic residues from wafer surfaces, and stripping lift-off patterns in MEMS and compound semiconductor processes. Its fast evaporation rate and strong solvency power make it effective for quick photoresist removal before wet etching sequences.
Technical Specifications
| appearance | Colorless clear liquid |
| purity (%) | ≥99.9 (GC assay) |
| water content | ≤200 ppm |
| metallic impurities | ≤1 ppb each |
| non-volatile residue | ≤1 ppm |
Applications
- Photoresist dissolution and strip in lift-off process
- Organic contamination removal from wafer surfaces
- Cleaning of metal deposition fixtures and carriers
- Pre-clean before IPA rinse in solvent clean sequence
- Compound semiconductor (GaAs, InP) process cleaning
Key Features
- Ultra-pure semiconductor grade with sub-ppb metallic impurities
- Fast evaporation prevents liquid residues on wafer surfaces
- Excellent solubility for novolac and polyimide-based photoresists
- Packaged in nitrogen-blanketed containers to maintain purity
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CAS Number
67-64-1
Category
Semiconductor Etching ChemicalsAvailability
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