Isopropanol Semiconductor Grade (IPA Ultra-Pure)
CAS Number: 67-63-0
Semiconductor grade isopropanol (IPA) is an ultra-pure solvent used for wafer drying (Marangoni drying), photoresist dilution, cleaning of equipment surfaces, and as a final rinse solvent in wet bench processes. Its low water content and sub-ppb metallic impurity levels make it suitable for critical front-end and back-end semiconductor cleaning applications.
Technical Specifications
| appearance | Colorless clear liquid |
| purity (%) | ≥99.9 (IPA assay, GC) |
| water content | ≤100 ppm |
| metallic impurities | ≤1 ppb each |
| non-volatile residue | ≤1 ppm |
Applications
- Marangoni (IPA vapor) wafer drying after wet clean
- Photoresist thinning and coating optimization
- Wet bench equipment and fixture cleaning
- Final rinse solvent in organic clean sequences
- Particle removal in spin-rinse-dry (SRD) tools
Key Features
- Ultra-low water content for effective Marangoni drying performance
- Sub-ppb metallic purity prevents wafer surface contamination
- Low non-volatile residue leaves no stains after evaporation
- Compatible with all common semiconductor wafer materials
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CAS Number
67-63-0
Category
Semiconductor Etching ChemicalsAvailability
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