Dimethyl Sulfoxide Semiconductor Grade (DMSO)
CAS Number: 67-68-5
Semiconductor grade dimethyl sulfoxide (DMSO) is a polar aprotic solvent used in photoresist stripping formulations, particularly as a co-solvent with amines to enhance the removal of post-etch and post-ash polymer residues. Its high polarity and low toxicity compared to NMP make it an increasingly preferred solvent in advanced node BEOL cleaning chemistries.
Technical Specifications
| appearance | Colorless clear liquid |
| purity (%) | ≥99.9 (GC assay) |
| water content | ≤200 ppm |
| metallic impurities | ≤1 ppb each |
| non-volatile residue | ≤1 ppm |
Applications
- Post-etch and post-ash residue removal (BEOL)
- Co-solvent in amine-based photoresist strippers
- Polymer residue dissolution in via cleaning
- Advanced node interconnect clean formulations
- Lift-off process solvent for metal patterning
Key Features
- Lower toxicity profile compared to NMP, meeting emerging regulations
- High dielectric constant enhances ionic residue dissolution
- Miscible with water and most organic solvents for flexible formulation
- Sub-ppb metallic purity suitable for advanced logic and memory processes
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CAS Number
67-68-5
Category
Semiconductor Etching ChemicalsAvailability
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